Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462511 | Method, device and system for presenting information | Junzhi Gao, Bin Zhou, Ao Peng, Suibin Yao, Hao Hu +7 more | 2019-10-29 |
| 10410832 | Control of on-wafer CD uniformity with movable edge ring and gas injection adjustment | Saravanapriyan Sriraman, Alex Paterson | 2019-09-10 |
| 10242845 | Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber | Zhongkui Tan, Qian Fu, Qing Xu, Ying Wu, Saravanapriyan Sriraman +1 more | 2019-03-26 |