Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446394 | Spacer profile control using atomic layer deposition in a multiple patterning process | Mirzafer Abatchev, Yoko Yamaguchi, Aaron Eppler | 2019-10-15 |
| 10354888 | Method and apparatus for anisotropic tungsten etching | Zhongkui Tan, Huai-Yu Hsiao | 2019-07-16 |
| 10242845 | Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber | Zhongkui Tan, Yiting Zhang, Qing Xu, Ying Wu, Saravanapriyan Sriraman +1 more | 2019-03-26 |
| 10177003 | Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level | Zhongkui Tan, Ying Wu, Qing Xu, Hua Xiang | 2019-01-08 |