Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10446394 | Spacer profile control using atomic layer deposition in a multiple patterning process | Qian Fu, Yoko Yamaguchi, Aaron Eppler | 2019-10-15 |
| 10181412 | Negative ion control for dielectric etch | Alexei Marakhtanov, Rajinder Dhindsa, Eric A. Hudson, Andrew D. Bailey, III | 2019-01-15 |