Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504702 | Adjustable extended electrode for edge uniformity control | Olivier Luere, Leonid Dorf, Sunil Srinivasan, Denis M. Koosau, James Rogers | 2019-12-10 |
| 10448494 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10448495 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, James Rogers, Sunil Srinivasan, Anurag Kumar Mishra | 2019-10-15 |
| 10332727 | Methods for processing substrates using small plasma chambers | Richard A. Gottscho, Mukund Srinivasan | 2019-06-25 |
| 10312048 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2019-06-04 |
| 10276348 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Alexei Marakhtanov, Eric A. Hudson, Neil Benjamin | 2019-04-30 |
| 10249476 | Control of impedance of RF return path | Alexei Marakhtanov, Ken Lucchesi, Luc Albarede | 2019-04-02 |
| 10181412 | Negative ion control for dielectric etch | Alexei Marakhtanov, Mirzafer Abatchev, Eric A. Hudson, Andrew D. Bailey, III | 2019-01-15 |