Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10448494 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, James Rogers, Sunil Srinivasan | 2019-10-15 |
| 10448495 | Method of controlling ion energy distribution using a pulse generator with a current-return output stage | Leonid Dorf, Olivier Luere, Rajinder Dhindsa, James Rogers, Sunil Srinivasan | 2019-10-15 |
| 10283329 | ICP source for M and W-shape discharge profile control | James Rogers, John Poulose | 2019-05-07 |