Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395894 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2019-08-27 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson, Richard A. Gottscho | 2019-08-20 |
| 10304660 | Multi-level pulsing of DC and RF signals | Alex Paterson, Ying Wu | 2019-05-28 |
| 10224183 | Multi-level parameter and frequency pulsing with a low angular spread | Alex Paterson, Ying Wu | 2019-03-05 |