| 10510515 |
Processing tool with electrically switched electrode assembly |
Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Kallol Bera, Michael R. Rice +1 more |
2019-12-17 |
| 10475626 |
Ion-ion plasma atomic layer etch process and reactor |
Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, Leonid Dorf, Yang Yang |
2019-11-12 |
| 10453656 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2019-10-22 |
| 10418225 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman |
2019-09-17 |
| 10373807 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman |
2019-08-06 |
| 10312056 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman |
2019-06-04 |
| 10249495 |
Diamond like carbon layer formed by an electron beam plasma process |
Yang Yang, Lucy Chen, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins +5 more |
2019-04-02 |
| 10249470 |
Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding |
Jason A. Kenney, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf |
2019-04-02 |
| 10242847 |
Plasma processing apparatus and liner assembly for tuning electrical skews |
Zhigang Chen, Shahid Rauf, Kenneth S. Collins |
2019-03-26 |
| 10170279 |
Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding |
Jason A. Kenney, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf |
2019-01-01 |
