Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Steven Lane | 2019-08-27 |
| 10249470 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf | 2019-04-02 |
| 10170279 | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf | 2019-01-01 |