Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249470 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2019-04-02 |
| 10170279 | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding | James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2019-01-01 |