Issued Patents 2019
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Kallol Bera, James D. Carducci, Michael R. Rice +1 more | 2019-12-17 |
| 10475626 | Ion-ion plasma atomic layer etch process and reactor | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Leonid Dorf, Yang Yang | 2019-11-12 |
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Ankur Agarwal, Vijay D. Parkhe +2 more | 2019-10-29 |
| 10453656 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen +3 more | 2019-10-22 |
| 10386126 | Apparatus for controlling temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli +1 more | 2019-08-20 |
| 10249470 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy | 2019-04-02 |
| 10242847 | Plasma processing apparatus and liner assembly for tuning electrical skews | James D. Carducci, Zhigang Chen, Kenneth S. Collins | 2019-03-26 |
| 10170279 | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding | Jason A. Kenney, James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy | 2019-01-01 |