Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Vijay D. Parkhe +2 more | 2019-10-29 |
| 10395896 | Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation | Wonseok Lee, Kartik Ramaswamy, Haitao Wang | 2019-08-27 |