| 10497605 |
Substrate carrier |
— |
2019-12-03 |
| 10460916 |
Real time monitoring with closed loop chucking force control |
Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2019-10-29 |
| 10460968 |
Electrostatic chuck with variable pixelated magnetic field |
Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more |
2019-10-29 |
| 10403534 |
Pixilated cooling, temperature controlled substrate support assembly |
Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono, Senh Thach |
2019-09-03 |
| 10395964 |
Apparatus and method for measurement of the thermal performance of an electrostatic wafer chuck |
Matthew J. Busche, Michael R. Rice |
2019-08-27 |
| 10304715 |
Electrostatic chuck having thermally isolated zones with minimal crosstalk |
Konstantin Makhratchev, Jason Della Rosa, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. |
2019-05-28 |
| 10249526 |
Substrate support assembly for high temperature processes |
— |
2019-04-02 |
| 10177023 |
Protective cover for electrostatic chuck |
— |
2019-01-08 |
