Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Hamid Noorbakhsh, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |