Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10373810 | Showerhead having an extended detachable gas distribution plate | Xiaoping Zhou | 2019-08-06 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason Della Rosa, Brad L. Mays, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 10177050 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, John Zheng Ye, David H. Quach, Sean S. Kang | 2019-01-08 |