Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Dan Marohl, Sergio Fukuda Shoji | 2019-11-26 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy +1 more | 2019-08-13 |
| 10304715 | Electrostatic chuck having thermally isolated zones with minimal crosstalk | Vijay D. Parkhe, Konstantin Makhratchev, Jason Della Rosa, Hamid Noorbakhsh, Douglas A. Buchberger, Jr. | 2019-05-28 |
| 10274270 | Dual zone common catch heat exchanger/chiller | Fernando Silveira | 2019-04-30 |