Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Justin Phi, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2019-11-26 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Steven E. Babayan, David Ullstrom | 2019-10-08 |
| 10410900 | Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic | Shih-Ying Huang, Steven E. Babayan, Stephen Prouty, Anthony Huang | 2019-09-10 |
| 10366867 | Temperature measurement for substrate carrier using a heater element array | Zhiqiang Guo | 2019-07-30 |