Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, David Ullstrom | 2019-10-08 | $26,143,000 |
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Sushant S. Koshti, Michael R. Rice, Jennifer Y. Sun | 2019-09-10 | $15,043,000 |
| 10410900 | Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic | Shih-Ying Huang, Phillip Criminale, Stephen Prouty, Anthony Huang | 2019-09-10 | $15,043,000 |