Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, David Ullstrom | 2019-10-08 |
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Sushant S. Koshti, Michael R. Rice, Jennifer Y. Sun | 2019-09-10 |
| 10410900 | Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic | Shih-Ying Huang, Phillip Criminale, Stephen Prouty, Anthony Huang | 2019-09-10 |