Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Michael R. Rice, Steven E. Babayan, Jennifer Y. Sun | 2019-09-10 |
| 10199256 | Methods and systems for improved mask processing | Edward Ng, Jeffrey C. Hudgens, Ayan Majumdar | 2019-02-05 |
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Dean C. Hruzek, Ayan Majumdar, John C. Menk, Helder Lee, Sangram Patil +3 more | 2019-01-29 |