Issued Patents 2019
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho | 2019-12-10 |
| 10468235 | Plasma spray coating enhancement using plasma flame heat treatment | Yikai Chen, Biraja P. Kanungo | 2019-11-05 |
| 10443126 | Zone-controlled rare-earth oxide ALD and CVD coatings | Xiaowei Wu, Michael R. Rice | 2019-10-15 |
| 10443125 | Flourination process to create sacrificial oxy-flouride layer | Xiaowei Wu, David Fenwick, Guodong Zhan, Michael R. Rice | 2019-10-15 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Biraja P. Kanungo, Tom K. Cho, Ying Zhang | 2019-09-17 |
| 10409295 | Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS) | Ming Xu, Sushant S. Koshti, Michael R. Rice, Steven E. Babayan | 2019-09-10 |
| 10385459 | Advanced layered bulk ceramics via field assisted sintering technology | Yikai Chen, Biraja P. Kanungo | 2019-08-20 |
| 10364197 | Heat treated ceramic substrate having ceramic coating | Ren-Guan Duan, Biraja P. Kanungo, Dmitry Lubomirsky | 2019-07-30 |
| 10336656 | Ceramic article with reduced surface defect density | Ren-Guan Duan, Thorsten Lill, Benjamin Schwarz | 2019-07-02 |
| 10260160 | High purity metallic top coat for semiconductor manufacturing components | Vahid Firouzdor | 2019-04-16 |
| 10242888 | Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance | Ren-Guan Duan, Jie Yuan, Li Xu, Kenneth S. Collins | 2019-03-26 |
| 10196728 | Plasma spray coating design using phase and stress control | Yikai Chen, Biraja P. Kanungo | 2019-02-05 |
| 10189141 | Chamber components with polished internal apertures | Vahid Firouzdor, David Koonce, Biraja P. Kanungo | 2019-01-29 |
| 10186400 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, David Fenwick, Guodong Zhan | 2019-01-22 |