Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2019-12-10 |
| 10468235 | Plasma spray coating enhancement using plasma flame heat treatment | Jennifer Y. Sun, Yikai Chen | 2019-11-05 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Tom K. Cho, Ying Zhang | 2019-09-17 |
| 10385459 | Advanced layered bulk ceramics via field assisted sintering technology | Jennifer Y. Sun, Yikai Chen | 2019-08-20 |
| 10364197 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Ren-Guan Duan, Dmitry Lubomirsky | 2019-07-30 |
| 10196728 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2019-02-05 |
| 10189141 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2019-01-29 |