Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Biraja P. Kanungo, Tom K. Cho | 2019-12-10 |
| 10260160 | High purity metallic top coat for semiconductor manufacturing components | Jennifer Y. Sun | 2019-04-16 |
| 10189141 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2019-01-29 |