Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192765 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Sushant S. Koshti, Dean C. Hruzek, Ayan Majumdar, Helder Lee, Sangram Patil +3 more | 2019-01-29 |