Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Anwar Husain, Haitao Wang, Evans Lee, Jaeyong Cho +3 more | 2019-12-10 |
| 10440777 | Azimuthally tunable multi-zone electrostatic chuck | Phillip Criminale, Steven E. Babayan, David Ullstrom | 2019-10-08 |
| 10428456 | Steel wire rope for conveyor belt | Lihua Liu, Hongfang Liu, Yongqing Shao, Yawei Zhang, Kai Xu +1 more | 2019-10-01 |
| 10410889 | Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors | S. M. Reza Sadjadi, Haitao Wang, Jie Zhou, Tza-Jing Gung, Fernando Silveira | 2019-09-10 |
| 10378108 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Sergio Fukuda Shoji, Kartik Ramaswamy, Roland Smith +1 more | 2019-08-13 |
| 10242893 | Method and apparatus for de-chucking a workpiece using a swing voltage sequence | Haitao Wang, Wonseok Lee, Sergio Fukuda Shoji, Kartik Ramaswamy | 2019-03-26 |