Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410889 | Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors | S. M. Reza Sadjadi, Haitao Wang, Jie Zhou, Tza-Jing Gung, Chunlei Zhang | 2019-09-10 |
| 10274270 | Dual zone common catch heat exchanger/chiller | Brad L. Mays | 2019-04-30 |