Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10410889 | Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors | Haitao Wang, Jie Zhou, Tza-Jing Gung, Chunlei Zhang, Fernando Silveira | 2019-09-10 |
| 10177050 | Methods and apparatus for controlling substrate uniformity | Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, David H. Quach, Sean S. Kang | 2019-01-08 |