Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515796 | Dry etch rate reduction of silicon nitride films | Michael Wenyoung Tsiang, Hang Yu, Deenesh Padhi | 2019-12-24 |
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal, Vijay D. Parkhe +2 more | 2019-10-29 |
| 10410889 | Systems and methods for electrical and magnetic uniformity and skew tuning in plasma processing reactors | S. M. Reza Sadjadi, Haitao Wang, Jie Zhou, Chunlei Zhang, Fernando Silveira | 2019-09-10 |
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Joseph AuBuchon, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung, Steven Lane +2 more | 2019-04-02 |