Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal, Vijay D. Parkhe +2 more | 2019-10-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460968 | Electrostatic chuck with variable pixelated magnetic field | Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal, Vijay D. Parkhe +2 more | 2019-10-29 |