Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Yang Yang, Richard Fovell | 2019-08-27 |
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Joseph AuBuchon, Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung +2 more | 2019-04-02 |
| 10249495 | Diamond like carbon layer formed by an electron beam plasma process | Yang Yang, Lucy Chen, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins +5 more | 2019-04-02 |
| 10170278 | Inductively coupled plasma source | Andrew Nguyen, Kartik Ramaswamy, Yang Yang | 2019-01-01 |