Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10475626 | Ion-ion plasma atomic layer etch process and reactor | Kenneth S. Collins, Kartik Ramaswamy, James D. Carducci, Shahid Rauf, Leonid Dorf | 2019-11-12 | $41,829,000 |
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Lawrence Wong, Kartik Ramaswamy, Steven Lane, Richard Fovell | 2019-08-27 | $34,720,000 |
| 10249479 | Magnet configurations for radial uniformity tuning of ICP plasmas | Joseph AuBuchon, Tza-Jing Gung, Travis Koh, Nattaworn Boss Nunta, Sheng-Chin Kung +2 more | 2019-04-02 | $31,503,000 |
| 10249495 | Diamond like carbon layer formed by an electron beam plasma process | Lucy Chen, Jie Zhou, Kartik Ramaswamy, Kenneth S. Collins, Srinivas D. Nemani +5 more | 2019-04-02 | $31,503,000 |
| 10167560 | Method and apparatus for structural coloration of metallic surfaces | Ping Guo | 2019-01-01 | |
| 10170278 | Inductively coupled plasma source | Andrew Nguyen, Kartik Ramaswamy, Steven Lane | 2019-01-01 |