Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Kartik Ramaswamy, Yang Yang, Steven Lane, Richard Fovell | 2019-08-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395904 | Method of real time in-situ chamber condition monitoring using sensors and RF communication | Kartik Ramaswamy, Yang Yang, Steven Lane, Richard Fovell | 2019-08-27 |