Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453656 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Douglas A. Buchberger, Jr. +3 more | 2019-10-22 |
| 10446418 | Symmetric chamber body design architecture to address variable process volume with improved flow uniformity/gas conductance | Yogananda Sarode Vishwanath, Tom K. Cho | 2019-10-15 |
| 10386126 | Apparatus for controlling temperature uniformity of a substrate | Kallol Bera, Xiaoping Zhou, Douglas A. Buchberger, Jr., Hamid Tavassoli, Surajit Kumar +1 more | 2019-08-20 |
| 10170278 | Inductively coupled plasma source | Kartik Ramaswamy, Yang Yang, Steven Lane | 2019-01-01 |