Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510515 | Processing tool with electrically switched electrode assembly | Kenneth S. Collins, Kartik Ramaswamy, Shahid Rauf, James D. Carducci, Michael R. Rice +1 more | 2019-12-17 |
| 10386126 | Apparatus for controlling temperature uniformity of a substrate | Xiaoping Zhou, Douglas A. Buchberger, Jr., Andrew Nguyen, Hamid Tavassoli, Surajit Kumar +1 more | 2019-08-20 |
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Li-Qun Xia +1 more | 2019-04-30 |