Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Bhaskar Jyoti Bhuyan, Mark Saly | 2019-10-22 |
| 10319583 | Selective deposition of silicon nitride films for spacer applications | Ning Li, Mihaela Balseanu | 2019-06-11 |
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Kallol Bera +1 more | 2019-04-30 |
| 10236198 | Methods for the continuous processing of substrates | Banqiu Wu, Nag B. Patibandla, Toshiaki Fujita, Ralf Hofmann, Pravin K. Narwankar +2 more | 2019-03-19 |
| 10170298 | High temperature silicon oxide atomic layer deposition technology | Wenbo Yan, Cong Trinh, Ning Li, Victor Nguyen, Mihaela Balseanu +1 more | 2019-01-01 |