Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Mark Saly | 2019-10-22 |
| 10219373 | Selective deposition of thin film dielectrics using surface blocking chemistry | David Thompson, Mark Saly | 2019-02-26 |