Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Mihaela Balseanu, Li-Qun Xia, Bhaskar Jyoti Bhuyan | 2019-10-22 |
| 10354861 | Low temperature molecular layer deposition of SiCON | David Thompson, Lakmal C. Kalutarage | 2019-07-16 |
| 10219373 | Selective deposition of thin film dielectrics using surface blocking chemistry | David Thompson, Bhaskar Jyoti Bhuyan | 2019-02-26 |
| 10170298 | High temperature silicon oxide atomic layer deposition technology | Wenbo Yan, Cong Trinh, Ning Li, Victor Nguyen, Mihaela Balseanu +1 more | 2019-01-01 |