Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453678 | Method and apparatus for deposition of low-k films | Ning Li, Zhelin Sun, Li-Qun Xia, Bhaskar Jyoti Bhuyan, Mark Saly | 2019-10-22 |
| 10319583 | Selective deposition of silicon nitride films for spacer applications | Ning Li, Li-Qun Xia | 2019-06-11 |
| 10170298 | High temperature silicon oxide atomic layer deposition technology | Wenbo Yan, Cong Trinh, Ning Li, Victor Nguyen, Li-Qun Xia +1 more | 2019-01-01 |