Issued Patents 2019
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508340 | Atmospheric lid with rigid plate for carousel processing chambers | Kevin Griffin | 2019-12-17 |
| 10494736 | Device to increase deposition uniformity in spatial ALD processing chamber | Alexander S. Polyak | 2019-12-03 |
| 10415137 | Non-metallic thermal CVD/ALD Gas Injector and Purge Systems | Alexander S. Polyak | 2019-09-17 |
| 10351956 | Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD | Kaushal Gangakhedkar | 2019-07-16 |
| RE47440 | Apparatus and method for providing uniform flow of gas | Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more | 2019-06-18 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10273578 | Top lamp module for carousel deposition chamber | Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 10262888 | Apparatus and methods for wafer rotation in carousel susceptor | Kaushal Gangakhedkar | 2019-04-16 |
| 10256125 | Wafer processing systems including multi-position batch load lock apparatus with temperature control capability | William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more | 2019-04-09 |
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Kevin Griffin | 2019-02-05 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Abraham Ravid, Alex Minkovich, Somesh Khandelwal, Todd Egan | 2019-02-05 |
| 10192770 | Spring-loaded pins for susceptor assembly and processing methods using same | — | 2019-01-29 |
| 10186449 | Apparatus and methods for wafer rotation to improve spatial ALD process uniformity | William T. Weaver, Jeffrey Blahnik | 2019-01-22 |