| 10508340 |
Atmospheric lid with rigid plate for carousel processing chambers |
Kevin Griffin |
2019-12-17 |
| 10494736 |
Device to increase deposition uniformity in spatial ALD processing chamber |
Alexander S. Polyak |
2019-12-03 |
| 10415137 |
Non-metallic thermal CVD/ALD Gas Injector and Purge Systems |
Alexander S. Polyak |
2019-09-17 |
| 10351956 |
Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD |
Kaushal Gangakhedkar |
2019-07-16 |
| RE47440 |
Apparatus and method for providing uniform flow of gas |
Mei Chang, Faruk Gungor, Paul F. Ma, David Chu, Chien-Teh Kao +2 more |
2019-06-18 |
| 10312120 |
Position and temperature monitoring of ALD platen susceptor |
Abraham Ravid, Kevin Griffin, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich |
2019-06-04 |
| 10273578 |
Top lamp module for carousel deposition chamber |
Robert T. Trujillo, Kevin Griffin, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more |
2019-04-30 |
| 10262888 |
Apparatus and methods for wafer rotation in carousel susceptor |
Kaushal Gangakhedkar |
2019-04-16 |
| 10256125 |
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability |
William T. Weaver, Jason M. Schaller, Jeffrey Blahnik, Robert Brent Vopat, Malcolm N. Daniel, JR. +1 more |
2019-04-09 |
| 10197385 |
Intelligent hardstop for gap detection and control mechanism |
Somesh Khandelwal, Garry K. Kwong, Kevin Griffin |
2019-02-05 |
| 10196741 |
Wafer placement and gap control optimization through in situ feedback |
Kevin Griffin, Abraham Ravid, Alex Minkovich, Somesh Khandelwal, Todd Egan |
2019-02-05 |
| 10192770 |
Spring-loaded pins for susceptor assembly and processing methods using same |
— |
2019-01-29 |
| 10186449 |
Apparatus and methods for wafer rotation to improve spatial ALD process uniformity |
William T. Weaver, Jeffrey Blahnik |
2019-01-22 |
