Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Edward W. Budiarto, Robert O. Miller, Bridger Earl HOERNER, Robert W. Batz, Jr. +1 more | 2019-04-16 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Alex Minkovich, Somesh Khandelwal, Joseph Yudovsky, Todd Egan | 2019-02-05 |