Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468326 | Metamaterial systems and methods for their use | Thomas Siegmund, Yuezhong Feng | 2019-11-05 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Kevin Griffin, Abraham Ravid, Alex Minkovich, Joseph Yudovsky, Todd Egan | 2019-02-05 |
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Garry K. Kwong, Kevin Griffin, Joseph Yudovsky | 2019-02-05 |