Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10508340 | Atmospheric lid with rigid plate for carousel processing chambers | Joseph Yudovsky | 2019-12-17 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Garry K. Kwong, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 10216012 | Wearable accessory with an inner chamber | Timothy R. Dexter | 2019-02-26 |
| 10196741 | Wafer placement and gap control optimization through in situ feedback | Abraham Ravid, Alex Minkovich, Somesh Khandelwal, Joseph Yudovsky, Todd Egan | 2019-02-05 |
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Garry K. Kwong, Joseph Yudovsky | 2019-02-05 |