Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10501844 | Fine leveling of large carousel based susceptor | — | 2019-12-10 |
| 10351956 | Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALD | Joseph Yudovsky | 2019-07-16 |
| 10312120 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Dmitry A. Dzilno, Alex Minkovich | 2019-06-04 |
| 10262888 | Apparatus and methods for wafer rotation in carousel susceptor | Joseph Yudovsky | 2019-04-16 |