Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10273578 | Top lamp module for carousel deposition chamber | Joseph Yudovsky, Robert T. Trujillo, Kevin Griffin, Kallol Bera, Li-Qun Xia +1 more | 2019-04-30 |
| 10197385 | Intelligent hardstop for gap detection and control mechanism | Somesh Khandelwal, Kevin Griffin, Joseph Yudovsky | 2019-02-05 |