Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522375 | Monitoring system for deposition and method of operation thereof | Majeed A. Foad, Ralf Hofmann, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2019-12-31 |
| 10281261 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee, Dale R. Du Bois +1 more | 2019-05-07 |
| 10260855 | Electroplating tool with feedback of metal thickness distribution and correction | Todd Egan, Robert O. Miller, Abraham Ravid, Bridger Earl HOERNER, Robert W. Batz, Jr. +1 more | 2019-04-16 |
| 10234261 | Fast and continuous eddy-current metrology of a conductive film | Dmitry A. Dzilno, Todd Egan, Jeffrey C. Hudgens, Nir Merry | 2019-03-19 |