Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522375 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Majeed A. Foad, Ralf Hofmann, Thomas Nowak, Todd Egan | 2019-12-31 |
| 10510624 | Metrology systems with multiple derivative modules for substrate stress and deformation measurement | Todd Egan, Samer Banna, Kyle Tantiwong | 2019-12-17 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2019-11-26 |
| 10474041 | Digital lithography with extended depth of focus | Guoheng Zhao, Jeremy Nesbitt, Christopher Dennis Bencher | 2019-11-12 |
| 10422984 | Flexible mode scanning optical microscopy and inspection system | Samer Banna, Waheb Bishara, Dong Wu | 2019-09-24 |
| 10394130 | Quarter wave light splitting | Christopher Dennis Bencher, Joseph R. Johnson, Dave Markle | 2019-08-27 |
| 10281261 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Todd Egan, Jeongmin Lee, Dale R. Du Bois +1 more | 2019-05-07 |