Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495446 | Methods and apparatus for measuring height on a semiconductor wafer | Shifang Li | 2019-12-03 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Yury Yuditsky, Dirk Woll +2 more | 2019-11-26 |
| 10474041 | Digital lithography with extended depth of focus | Jeremy Nesbitt, Christopher Dennis Bencher, Mehdi Vaez-Iravani | 2019-11-12 |
| 10462391 | Dark-field inspection using a low-noise sensor | Yung-Ho Alex Chuang, David L. Brown, Devis Contarato, John Fielden, Daniel Kavaldjiev +4 more | 2019-10-29 |
| 10234402 | Systems and methods for defect material classification | J. K. Leong, Michael D. Kirk | 2019-03-19 |
| 10228331 | Methods and apparatus for polarized wafer inspection | Sheng Liu | 2019-03-12 |