Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495579 | System and method for compensation of illumination beam misalignment | Frank Li, Zhiwei Xu, Timothy Swisher, Kwan Auyeung | 2019-12-03 |
| 10488348 | Wafer inspection | Anatoly Romanovsky, Ivan Maleev, Daniel Kavaldjiev, Dirk Woll, Stephen Biellak +2 more | 2019-11-26 |