Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510624 | Metrology systems with multiple derivative modules for substrate stress and deformation measurement | Mehdi Vaez-Iravani, Todd Egan, Kyle Tantiwong | 2019-12-17 |
| 10422984 | Flexible mode scanning optical microscopy and inspection system | Waheb Bishara, Dong Wu, Mehdi Vaez-Iravani | 2019-09-24 |
| 10410841 | Side gas injection kit for multi-zone gas injection assembly | Yan Rozenzon, Kyle Tantiwong, Imad Yousif, Vladimir Knyazik, Bojenna Keating | 2019-09-10 |
| 10332772 | Multi-zone heated ESC with independent edge zones | Kyle Tantiwong, Vladimir Knyazik | 2019-06-25 |
| 10271416 | High efficiency triple-coil inductively coupled plasma source with phase control | Waheb Bishara, Ryan Giar, Valentin N. Todorow, Dmitry Lubomirsky, Kyle Tantiwong | 2019-04-23 |