Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388549 | On-board metrology (OBM) design and implication in process tool | Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Hari Ponnekanti, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10373823 | Deployment of light energy within specific spectral bands in specific sequences for deposition, treatment and removal of materials | Swaminathan Srinivasan, Atashi Basu, Pramit Manna, Diwakar Kedlaya | 2019-08-06 |
| 10281261 | In-situ metrology method for thickness measurement during PECVD processes | Edward W. Budiarto, Todd Egan, Mehdi Vaez-Iravani, Jeongmin Lee, Dale R. Du Bois +1 more | 2019-05-07 |