Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10518418 | Wafer swapper | Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Sanjeev Baluja, Prajeeth Wilton | 2019-12-31 |
| 10483141 | Semiconductor process equipment | Karthik Janakiraman, Juan Carlos Rocha-Alvarez | 2019-11-19 |
| 10435787 | Hydrogen partial pressure control in a vacuum process chamber | James L'HEUREUX | 2019-10-08 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Juan Carlos Rocha-Alvarez, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10236197 | Processing system containing an isolation region separating a deposition chamber from a treatment chamber | Karthik Janakiraman, Abhijit Basu Mallick, Mandyam Sriram, Alexandros T. Demos, Mukund Srinivasan +2 more | 2019-03-19 |