| 10518418 |
Wafer swapper |
Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari Ponnekanti, Prajeeth Wilton |
2019-12-31 |
| 10490436 |
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Praket P. Jha, Krishna Nittala |
2019-11-26 |
| 10480068 |
Chamber liner for high temperature processing |
Ren-Guan Duan, Kalyanjit Ghosh |
2019-11-19 |
| 10483282 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-11-19 |
| 10325799 |
Dual temperature heater |
Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more |
2019-06-18 |
| 10312076 |
Application of bottom purge to increase clean efficiency |
Kalyanjit Ghosh, Mayur Govind Kulkarni |
2019-06-04 |
| 10233543 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sam Kim, Tuan Nguyen |
2019-03-19 |
| 10199388 |
VNAND tensile thick TEOS oxide |
Michael Wenyoung Tsiang, Praket P. Jha, Xinhai Han, Bok Hoen Kim, Sang Hyuk Kim +8 more |
2019-02-05 |
